Thyro-XD™ SCR Power Controller – Exacting Temperature Control

The Thyro-XD SCR power controller provides unprecedented speed and precision in semiconductor and industrial processes. It delivers exacting temperature control in lamp-based heating, even during rapid and dynamic heat ramps. Enhanced accuracy in load resistance measurement allows faster detection of temperature changes, while increased precision in voltage and current measurement enables swift compensation for input fluctuations. Compact and power-dense for semiconductor tools, the Thyro-XD delivers twice the control capacity in the same amount of space as previous technologies.

Features

• Enhanced voltage measurement and internal thermal management without fans

• Exclusive low harmonic distortion operation mode (VT)

• Multiple communications, control types, and operation modes

• Wide range of voltage input at 30 A current rating with high power measurement

• Sensitive load resistance change detection 

Benefits

• Optimal response time, control, stability, and repeatability

• Easy integration into existing control systems

• Precise, real-time temperature control with Impac pyrometer integration

• Cost- and size-optimized solution for small cabinets

• Increased process efficiency