Name: Paramount Plus RF Generator
Brand: AEI
Availability: InStock

Paramount Plus RF Generator

Brand: AEI

Category: RF Plasma Generators

RF Plasma Generators

Emerging Plasma Applications

eVerest® RF Generator

Paramount Plus RF Generator – Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 1 to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.

Key Features

Enhanced RF stability with tightly regulated power output
Advanced multi-level pulsing
Pulse synchronization and monitoring
Real-time power and impedance measurement
Advanced FastDAQ data acquisition system

Benefits

Precisely control RF
Enhance plasma stability
Expedite plasma transitions
Reduce process times
Improve process repeatability and chamber matching

Name*

Email*

Contact Number*

Message (optional)

Specifications

Paramount Plus RF Generator:
Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 1 to 60 MHz
Input Voltage (V): 208 VAC
Power Level (kW): 5 to 15 kW
Rack Width: Full rack
Height (Inches): 3U, 4U
Communications Interface: RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT
Advanced Features: Pulsing, arc management, CEX, MBFT
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE

Sorry, currently do not have any video uploaded.

PARAMOUNT® PLUS PULSED RF POWER SUPPLIES.pdf

5.38 MB

PRECISE POWER CONTROL IN 3D DEVICE ARCHITECTURES.pdf

647.3 KB

RF CALIBRATION SOLUTIONS.pdf

530.38 KB