Omni™ RF Diagnostic Cart

Calibrate with Accuracy, Optimize with Confidence.
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. It provides accurate RF calibration and diagnostics by combining  AE’s 5540A RF Power Meter with PowerInsight by Advanced Energy™ IoT enabled data ecosystem into a single, user-friendly cart.



.Key Features

• One RF power meter (combination of sensor and meter design) can be configured up to six frequencies
• Power accuracy of ±0.5% + 0.5 W across power range
• Frequency range band of 0.2 to 200 MHz, 5 kW
• Automatic or manual modes of measurement
• Metadata tagging and data storage capability for long term monitoring
• Local and remote monitoring access via touchscreen, HDMI, USB-C, or LAN
• Dashboards and alerts for visualization and predictive analytics
• Data export to CSV file
• Mobile cart with four locking swivel casters

Benefits

• Optimize RF power delivery for critical semiconductor processes
• Configuration of up to 6 frequencies within a single sensor lowers investment cost (covers 400 kHz, 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, and more)
• Yearly calibration of the sensor – ease of maintenance and lower operating costs
• Agnostic – measures RF power from non-AE power products
• Accessibility to sensor for ease of calibration and servicing
• Unique data collection features to track trends and reduce equipment downtime and operational costs
• Mobile design for easy navigation within fabs
• Customizations provided upon request