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  5. Opti™ RF Power Rack
Opti™ RF Power Rack
Opti™ RF Power Rack
Opti™ RF Power Rack

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Opti™ RF Power Rack

Brand: AEI

Category: Integrated Systems
  • Semiconductor applications
  • RF Plasma Generators

    • Omni™ RF Diagnostic Cart

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    Efficiency Meets Insight
    The Opti RF power rack is a modernized solution for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools. It is designed to enable high efficiency, providing the intelligence needed to monitor health and optimize processes. 

    Customized solutions for other 200 mm tools are available upon request




    .Key Features

    • High-performance AE generators with > 70% efficiency at full power
    • Real-time HMI dashboard and PowerInsight
    • Built-in safety including EMO switch, leak detection, smoke detection, and overcurrent protection
    • Optional remote access within secure fab networks

    Benefits

    • Higher process stability and efficiency from advanced RF power delivery
    • View live system data and historical data (up to one hour), temperature charts, and time-stamped fault and warning history from each generator
    • Significant ROI in operating cost and tool downtime
    • Versatile design for easy accessibility and serviceability

    Specifications

    Opti™ RF Power Rack:
    Rack Size, with casters and lift hooks (H x W x D): 43.67 in (1109 mm) x 22.56 in (573 mm) x 36.88 in (935.75 mm)
    RF Generators: Two Paramount Plus generators (2 MHz, 5 kW) and one Paramount generator (13.56 MHz, 5 kW)
    Line Voltage: 200/208 VAC +/-10% (47 to 63 Hz)
    AC to RF Efficiency: Above 70% efficient at full power
    EMO: Attached to rack with guard
    Smoke Sensor: Smoke/dust detector fed by a small fan. Tied to EMO.
    Leak Detector: Sensor on bottom water catch tray. Tied to EMO.
    PowerInsight HMI: 10.1 in adjustable touchscreen tablet
    Advanced Features: Data recording, exporting, and reporting and HMI remote access

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