Rapid Ox Remote Plasma Source

Ideal Remote Plasma Source for Oxygen-Based Processes
Reduce recombination effects and extend the lifetime of oxygen radicals thanks to Rapid OX's removable quartz liner. When compared to anodized chambers, the resultant reactive species extended lifetime improves photoresist strip rates. And because the quartz liner is easily installed or removed by the operator, it decreases downtime and significantly lowers replacement costs


Key Features

• Quartz liner makes it ideal for photoresist ashing or carbon chamber clean processes
• Variable frequency matching provides a range of plasma impedance operation, controlled by varying gas chemistry, pressure, and power set point
• Improved thermal management helps ensure long chamber lifetime
• Rapid OX quickly ignites and reaches steady-state operation due to low dynamic pressure overshoot

Benefits

• Significantly reduce downtime and cost of ownership via a removable and replaceable quartz chamber
• Improve process performance thanks to a high dissociation rate and high-density radical generation
• Ensure repeatable, controllable processes with variable frequency tuning and precise power control
• Increase the chamber lifetime and reduce service costs thanks to the reliable design and cooling system
• Improve tool utilization, reduce preventive maintenance, and lower CoO